durusmail: mems-talk: tapered oxide
tapered oxide
2004-06-21
tapered oxide
annuar
2004-06-21
Dear all,

Does anyone know how to fabricate a tapered oxide structure? The oxide layer
will be deposit via PECVD. Thanks.

Abang Annuar Ehsan
Photonics Tech. Lab
Institute of Micro Engineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia (UKM)
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