Dear all, Does anyone know how to fabricate a tapered oxide structure? The oxide layer will be deposit via PECVD. Thanks. Abang Annuar Ehsan Photonics Tech. Lab Institute of Micro Engineering and Nanoelectronics (IMEN) Universiti Kebangsaan Malaysia (UKM) --- Outgoing mail is certified Virus Free. Checked by AVG anti-virus system (http://www.grisoft.com). Version: 6.0.698 / Virus Database: 455 - Release Date: 6/2/2004