Hi Annuar,

I believe the way to do this is to use a grey-scale mask and to conduct
lithography with your SU-8 on a transparent substrate from the bottom up.

Regards,

Michael



>From: "annuar" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] tapered SU-8 structure
>Date: Mon, 21 Jun 2004 10:17:41 +0800
>
>Dear all,
>
>I'm thinking of making tapered structure on SU-8. SU-8 usually gives a very
>good vertical structured component. However, I wanted to make SU-8
>structure
>to be taper with a certain degree of angle, say 45 degrees. Has anyone ever
>try making such structure using SU-8?
>
>Thanks.
>Abang Annuar Ehsan
>Photonics Tech. Lab
>Institute of Micro Engineering and Nanoelectronics (IMEN)
>Universiti Kebangsaan Malaysia (UKM)

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