Hi I guess a "soft cure" (75% according to DOW) of BCB would help to improve the adhesion between BCB and subsequent layer. You will need to eventually complete BCB cure ("hard cure") after SU-8 patterning. This normally is done at a baking temperature of 250 degree. If such a high temperature raises concern for SU-8, the hard cure can also be achieved at a lower temperature, although with a much longer baking time. www.cyclotone.com has all these tips. Another possible cause could be SU-8, say under exposure or solvent not fully evoparated. Try increase exposure dose or the soft bake time/temperature. Hope these helps. Xianling Chen Photonics, TRLabs Edmonton, Canada >===== Original Message From "Michael A. Powers"===== >Hello, > >I have experimented with SU-8 layers patterned on BCB. The adhesion at the >SU-8 / BCB interface varies from poor to awful. Has anyone else tried this >before? I've tried AP3000 as an adhesion promoter to no avail. > >Thanks, >-M. A. Powers