Pyrex can be anodically bond to silicon nitride if the surface of the
nitride is first oxidized.  A 4-hour wet oxidation at 1100 degC should
do it.

Roger Shile

-----Original Message-----
Hello everyone,
I wanted to know if any of you has any experience in doing anodic
bonding
of
a n-type wafer with 1000A thick nitride (LPCVD), to a pyrex glass
wafer. All the suggestions will be highly appreciated.
Thanks
Rahul agarwal