I also do lift off process on no-doped GaN but I think it should be the same thing. To answer your question, I think you don't put enought resist on the sample before spin coating. I had the same problem, there is resist only on the center of the sample. If you have tiny samples, like me ( 5mm*5mm) Try to do that : put your sample on something else like a glass wafer or a silicon one or something else just to stick on it. use your resist as a glue, post baking some second. Spin coat, but put enought resist to overcover your sample and a part of your support wafer. It's not sure it works but I do that and the lift off works An other thing, be sure of the thickness of the resist layer PS: for information my procedure is 1) cleaning wafer like you 2)spin coating a positive photoresist (S1818) at 3000 rpm for 10s 3) post bake for 2 min at 110°C 4) exposure 5)develop with MF 319 30s