I'm not sure whether this is informative to you.
Anyway, this is the composition of SU-8 2050.

Cyclopentanone (CAS: 120-92-3); 65%.
 Mixed Triarylsulfonium/ Hexafluoroantimonate Salt;
    (CAS: 89452-37-9)/(CAS: 71449-78-0); 1%
 Propylene Carbonate (CAS: 108-32-7); 1%
 Epoxy Resin (CAS: 28906-96-9); 33%

Lee, Duhyun

========================================
duhyun@skku.edu
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
========================================
----- Original Message -----
From: "Jung-Sik KIM" 
To: 
Sent: Thursday, June 24, 2004 4:13 AM
Subject: [mems-talk] SU-8 chemical composition


> Dear MEMS COMMUNITY,
>
> This is Jungsik Kim in the University of Birmingham.
>
> I have been used GTA(Thermogravimetric analysis) for SU-8 under Nitrogen
> atmosphere and ambient air conditions.
> Under N-gas, nearly 20% mass of SU-8(mostly Carbon) remained, but under
> air with Oxygen, almost all of them were burned out.
>
> Therefore, I'm searching for help.
> Has anyone knows chemical composition of SU-8?
>
> If yes, please let me know that.
>
> Best wishes,
>
> Jungsik Kim
>
> =========================================
> Mr. Jung-Sik, Kim
> School of Manufacturing and Mechanical Engineering
> The University of Birmingham
> Edgbaston, Birmingham B15 2TT
> Tel:  44 (0)121 414 4245
> Fax: 44 (0)121 414 3958
> =========================================
>
>
>