Hi,

We want to blanket-etch a thin PDMS layer (1~2um thick) with
CF4/O2 plasma.  Can anyone suggest a suitable gas mixture,
power, pressure and also the associated etch rate?

Thanks a lot!

Jun

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Jun Zou
319B Micro and Nanotechnology Lab
University of Illinois at Urbana-Chamapaign
208 N. Wright St.
Urbana, IL 61801
Phone: (217)265-0808
Fax: (217)244-6375
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