durusmail: mems-talk: SU-8 Removal
Plasma etching of thin PDMS layer
2004-07-04
2004-07-04
SU-8 Removal
2004-07-04
2004-07-06
SU-8 Removal
Tingrui Pan
2004-07-04
Dear Colleagues,

Does anyone have any experience on removing SU-8 layer after
photolithography (with or without hard bake)? I need to use SU-8 as a mold
to do electroplating and SU-8 should be removed eventually. Thank you very
much for any of your suggestion,

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Tingrui Pan
Ph.D. Candidate
Electrical Engineering
University of Minnesota
Phone:   612-626-7188 (Lab)
         612-624-5034 (Office)
Website: www.ece.umn.edu/groups/umbmlab
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