We sometimes use Fomblin oil and it seems to help with heat spread. In a message dated 7/8/2004 2:40:03 PM Eastern Daylight Time, "Han Geun Yu"writes: >Hi, I am struggling with heat problem of substrate while doing drie. Because I use small piece, I need carrier wafer to do drie and I think it makes heat to flow little. If you know any glue or greese to increase the heat flow, please let me know. > >Thank you. > >Han >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ >