durusmail: mems-talk: Question about thermal conductive glue for drie
Question about thermal conductive glue for drie
2004-07-08
2004-07-10
2004-07-15
Question about thermal conductive glue for drie
BobHendu@aol.com
2004-07-08
We sometimes use Fomblin oil and it seems to help with heat spread. In a message
dated 7/8/2004 2:40:03 PM Eastern Daylight Time, "Han Geun Yu" 
writes:

>Hi, I am struggling with heat problem of substrate while doing drie. Because I
use small piece, I need carrier wafer to do drie and I think it makes heat to
flow little. If you know any glue or greese to increase the heat flow, please
let me know.
>
>Thank you.
>
>Han
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