Hi Fritz, We use a two "tool" process 50 deg C - 200 deg C on a hotplate, then into a tube furnace purged with nitrogen from 200-350 deg C. -Mike >>> kub@nrl.navy.mil 7/16/2004 12:59:48 PM >>> We are in the process of purchasing a tool for for controlled 3-temperature step nitrogen-ambient curing of polyimide films? Could someone describe the preferred tool either homemade or commercial? Fritz Kub Naval Research Laboratory -- _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/