At 09:30 PM 11/6/98 -0800, you wrote:
>Hello,
>
>Dose anyone know the selective etchant for silicon oxide agaist chromium? My
>structure is Cr/SiO/Cr and try to wet etch SiO. Your help is deeply
>appreciated.
>
>Zeting Pei


Why do you want to use wet etching ?

In your case, it's better to use RIE.

Eric