durusmail: mems-talk: AlN dry etching
AlN dry etching
2004-07-19
2004-07-20
Intellisense Doubt :)
2004-07-20
Backside Oxidation remove for DRIE
2004-07-21
AlN dry etching
Kamal Yadav
2004-07-20
Does anybody know how to get a 100 um thick layer of polymers on silicon.
Polymers like polyimide, PMMA, Photoresist, PVA.

Thanks

Kamal Yadav
Graduate Student
Rose Hulman Institute of Technology,
Indiana 47803


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