durusmail: mems-talk: Intellisense Doubt :)
AlN dry etching
2004-07-19
2004-07-20
Intellisense Doubt :)
2004-07-20
Backside Oxidation remove for DRIE
2004-07-21
Intellisense Doubt :)
Sudhanshu Garg
2004-07-20
Hi,

I want to implant phosphorous in boron implanted silicon (p type).
Intellisense doesn't seem to allow implantation on a pre-implanted
material. I can't even etch the latter. I don't want to go the long way by
adding a mask and making pits. Any way out ?

(seems there are roadblocks just everywhere you go!)

thanks,
Sudhanshu
India

~*~

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