Linas, You might find resources discussing it on University sites, like this paper: http://www.engineering.cornell.edu/engrc350/ingenuity/Tung_MF_issue_1.pdf Those terms, 2D and 3D MEMS, in my mind refer only to optical switching products. Generally, a MEMS device by default will be a "3D" structure, of course. There are many types of applications of MEMS, I think the term "3D MEMS" is clic lingo only in the optical product space. So, referring to optical switches, the 2D variety will generally be limited by die size which in turn limits number of inputs and outputs (eg, 8x8, 16x16). It also becomes limited by the optical path length through air from input lens, to the mirror, back to an output lens, since the light path is being sent "in 2 dimensions", or planar to the die surface. 2D switches are also generally cheaper and simpler to build than 3D systems. The 3D optical switches are different in that their input optical paths come in "at any angle" down to a focused location, where mirror arrays re-direct back to another, separate "any angle" location. The device is therefore operating in 3 dimensions of space. - Justin Justin C. Borski MEMS Program Manager Advanced MicroSensors Inc. jborski@advancedmicrosensors.com -----Original Message----- From: Jauniskis, Linas [mailto:ljauniskis@foster-miller.com] Sent: Wednesday, July 21, 2004 3:36 PM To: mems-talk@memsnet.org Subject: [mems-talk] 3D vs 2D MEMS I am doing some background research and haven't found a clear explanation of the design difference between 2D and 3D MEMS. Can anyone offer an explanation or provide a link with one? Thanks, L. _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ **********************AMS CONFIDENTIAL AND PROPRIETARY INFORMATION***************************** This e-mail communication and any attachments are confidential and intended only for the use of the designated recipients named above.