Kamal
Surface roughness after etching depends on both the original wafer as
well the the method of etching.
Generally if the choose is Silicon or Poly silicon, the Silicon will be
  smoother, BUT tell us more about what you are trying to do and the
methods.
Pyrex can have much lower surface roughness than silicon after
polishing. so when you say something else , what are you considering.

Regards
Ken

Kamal Yadav wrote:
> Does anybody has any idea about the surface roughness after etching
> silicon or polysilicon or something else. Which one is the most
> smooth.
>
> Thanks
> Kamal
>
>


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