aqua regia can etch Pt but not sure if the resist can survive. As your
description, why not using liftoff.

Good luck,

Hongjun Zeng, PhD
Microfabrication Application Laboratory (MAL)
University of Illinois at Chicago
3014 ERF Building, 842 W. Taylor Street
Chicago, IL 60607
Tel. 312-413-5889, Fax: 312-996-6465


-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Imran Ghauri
Sent: Monday, July 26, 2004 1:35 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Platinum etch

Hi,

Can anyone help me in finding

1) the best recipe for the wet etch for Platinum which
can stand standard  photoresist (AZ 4330).

2)Also, I want to create some rectangular shape
(1mmx1mm) cavities of about 20 microns deep. Can
anyone help me in this regard too. I've on my one
wafer devices with metal combinations Pt/Ti and on
other wafer devices Pt/Cr and third wafer with Ti/Cr.
Will it be feasible to create cavities before or after
fab process. Any suggestions will be appreciated.

imran
mi_ghauri@yahoo.com
Grad Student




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