durusmail: mems-talk: making polyimide hydrophilic
making polyimide hydrophilic
2004-07-26
2004-07-26
making polyimide hydrophilic
Robert Dean
2004-07-26
Sudheer,

Hi.  Try exposing it to a short burst (~30s) of oxygen chemistry cold
plasma.  This can be performed in an RIE or an asher.

Sincerely,

Robert Dean
Auburn University

At 03:52 PM 7/26/04, you wrote:
>Hi all,
>
>I was looking for a way to make polyimide surface hydrophilic. If anyone
>has done it, please let me know.
>
>Thanks
>-Sudheer
>
>UWisconsin-Madison
>
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