durusmail: mems-talk: making polyimide hydrophilic
making polyimide hydrophilic
2004-07-26
2004-07-26
making polyimide hydrophilic
Michael D Martin
2004-07-27
While the below will work, I don't think it lasts long upon exposure to
water. It is better to covalently modify the surface with some polar
molecule. Contact Jeff Chinn at jeff_chinn@appliedmst.com , they make
molecular vapor deposition tools for this sort of thing.

-Mike Martin

>>> rdean@eng.auburn.edu 7/26/2004 6:20:10 PM >>>
Sudheer,

Hi.  Try exposing it to a short burst (~30s) of oxygen chemistry cold
plasma.  This can be performed in an RIE or an asher.

Sincerely,

Robert Dean
Auburn University

At 03:52 PM 7/26/04, you wrote:
>Hi all,
>
>I was looking for a way to make polyimide surface hydrophilic. If
anyone
>has done it, please let me know.
>
>Thanks
>-Sudheer
>
>UWisconsin-Madison
>
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