Sensors and Actuators 77 1999 106¨C112
www.elsevier.nlrlocatersna
Measurement of the effective transverse piezoelectric coefficient e of 31,f
 / AlN and Pb Zr ,Ti O thin films x 1yx 3
Marc-Alexandre Dubois ), Paul Muralt
Laboratoire de Ceramique, Swiss Federal Institute of Technology, DMX-LC
Ecublens, CH-1015 Lausanne, Switzerland ¡ä
Received 7 July 1998; received in revised form 28 December 1998; accepted 15
February 1999



Sensors and Actuators A 107 (2003) 68¨C74
Measurement of transverse piezoelectric properties of PZT thin films

=====================================
There are many papers in the publication such as Sensors and Actuators,IEEE
UFFC...
You can find them by searching in Elsevier or IEL.
Good luck!



======= 2004-08-02 12:46:00 ÄúÔÚÀ´ÐÅÖÐдµÀ£º=======

>I would like to know is there any publication on how to measure PZT
>coefficient (e31)?  THANKS!
>
>_______________________________________________
>MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/
>.

= = = = = = = = = = = = = = = = = = = =


              *******************************************
¡¡¡¡¡¡¡¡¡¡¡¡¡¡ * Jianhua Tong                            *
              * MST Center of DUT  P.R.China. 116023    *
¡¡¡¡¡¡¡¡¡¡¡¡¡¡ * tongjh@student.dlut.edu.cn              *
              * Tel.+86 411 84707713-8110               *
¡¡¡¡¡¡¡¡¡¡¡¡¡¡ * 2004-08-03                              *
              *******************************************