Hi Tan

        Normally a thermocouple is located near to the substrate holder in
the evaporation system.This shows not the actual temp of substarte but is
close enough.








     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071




On Wed, 4 Aug 2004 mems-talk-request@memsnet.org wrote:

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