Hi, there: I was trying to find some etchant to etch SiO2 while protecting my ZnO nanowires. Does anybody know how to do this ? I once read a message talking about etch ZnO films while protecting SiO2, which is quite the opposite of my objection. What I plan to do is to disperse some ZnO nanowires on the SiO2 surface, and to etch a small well underneath the nanowires afterwards. I won't mind to use Dry Etch or Wet Etch, as long as the etchant won't etch ZnO nanowires, it's fair enough for me. Any suggestions are welcome, thanks Best wishes Yong Sun