durusmail: mems-talk: Double depth SU-8
Double depth SU-8
2004-08-16
2004-08-17
Double depth SU-8
Matthew Davies
2004-08-16
Hi all

I’m trying to find out if there is an easy method for seeing developed
SU-8 through another layer of SU-8.  We are trying to make devices
requiring double depth processing and the aligning of the photomask for
the second layer is very difficult as we are currently unable to see the
developed SU-8 on the bottom layer.  At the moment we need to
overdevelop the bottom SU-8 layer until cracks appear at which point we
can see the cracks through the top layer of SU-8.

Any suggestions would be much appreciated.

Thanks all

Matt Davies
STRC, University of Hertfordshire

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