This describes Dr. Ken Gabriel's MEMS Program

MEMS is an enabling technology that merges advances in information processing,
storage, and display with advances in sensors and actuators to bring about a
revolution in the way we both perceive and control the environment.

The MEMS program has at its core the research and development of advanced MEMS
devices and processes. These projects can be roughly categorized in four areas:
fluid sensing and control; inertial measurement units; electromagnetic/optical
beam steering; and distributed networks of sensors and actuators. In addition,
the program is also building an infrastructure for MEMS technology by
developing design and simulation tools, affordable fabrication services for
users in industry and academia, manufacturing equipment, and test and
characterization instruments. Recent accomplishments of the ARPA program
include the demonstration of an accelerometer operating at near 80,000 g's,
optical diffraction gratings that electromechanically switch light in 40
nanoseconds, and a fabrication service that has already provided hundreds of
distributed users from diverse backgrounds with affordable access to
micromachining processes at regular, scheduled intervals.

MEMS is a natural progression in the capabilities of semiconductor devices. The
ability of MEMS to gather and process information, decide on a course of
action, and control the environment through actuators increases the
affordability, functionality, and number of smart systems. The enhanced
capability of smart systems enabled by MEMS will increasingly be the product
differentiator of the 21st century, pacing the level of both defense and
commercial competitiveness.

The ETO Program Manager for this effort is:

Dr. Kaigham J. Gabriel (703) 696-2252 (phone), (703) 696-2206 (fax), and email:
kgabriel@arpa.mil

BAA 94-40
CBD Reference: July 1, 1994
ARPA Office: ETO
Fax Number: (703) 351-8616 (ATTN: BAA 94-40)
Email Address: BAA94-40@arpa.mil
Title: Microelectromechanical systems (MEMS)

Technical Areas Cited in BAA: MEMS manufacturing technologies; MEM systems
developments and demonstrations; infrastructure activities for MEMS design,
fabrication and characterization; and new application domains.

ABSTRACT Deadline Date: 4:00 pm, EDT, Friday, August 26, 1994
PROPOSAL Deadline Date: 4:00 pm, EDT, Friday, November 18, 1994

Please contact me if you require more information.
-       Simon Patrick Carr
        Staff Director
        Electronic Industries Association
        scarr@eia.org
        (703)907-7538
        Fax (703)907-7549