durusmail: mems-talk: Chromium etchant selective to copper
Chromium etchant selective to copper
2004-08-10
2004-08-11
2004-08-12
SU-8 Density?
Piezoelectric Beam Simulation by using Ansys
Removal of reflowed AZ resist
2004-08-16
2004-08-16
2004-08-17
Chromium etchant selective to copper
Kirt Williams
2004-08-17
CR-14 by Transene had some selectivity on our experiments, etching Cr 5
times faster than Cu.
CR-7 actually etched Cu faster than Cr, so don't use that.
See JMEMS etching papers, as reported earlier on this newsgroup.
    --Kirt Williams

----- Original Message -----
From: "Shweta Humad" 
To: 
Sent: Tuesday, August 10, 2004 2:57 PM
Subject: [mems-talk] Chromium etchant selective to copper
> Does anyone know of a chromium etchant selective to copper?
> Thanks,
> Shweta Humad


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