CR-14 by Transene had some selectivity on our experiments, etching Cr 5 times faster than Cu. CR-7 actually etched Cu faster than Cr, so don't use that. See JMEMS etching papers, as reported earlier on this newsgroup. --Kirt Williams ----- Original Message ----- From: "Shweta Humad"To: Sent: Tuesday, August 10, 2004 2:57 PM Subject: [mems-talk] Chromium etchant selective to copper > Does anyone know of a chromium etchant selective to copper? > Thanks, > Shweta Humad