durusmail: mems-talk: PDMS to metal bond and corona discharge
PDMS to metal bond and corona discharge
2004-08-22
2004-08-23
PDMS to metal bond and corona discharge
Michael D Martin
2004-08-24
Hi,
   Exposing PDMS to a corona discharge is roughly equivalent to exposing
it to an oxygen plasma. Did the paper mention what gas the corona
discharge was produced in? Air?

   This process is performed to break covalent bonds in the PDMS making
it more reactive (roughly speaking) with the adhesion promoter, 3-MPTMS.
Assuming the discharge was generated in air at atmospheric pressure the
same affects can be achieved using standard plasma processing equipment
(RIE,DRIE,ICP, etc.).

-Mike Martin

>>> gte185y@mail.gatech.edu 08/22/04 7:25 PM >>>

I'm patterning a gold electrode array onto PDMS.

A paper by Yongman Park [1] presents a method that gives good adhesion.
You
pattern the metal on glass and then stick it to a PDMS layer.

The paper says to expose the PDMS to corona discharge. How do you do
that? Why
do you do that? Is it the same as exposing to oxygen plasma?

The paper also says treat the metal on glass with
3-mereaptopropyltrimethoxysilane (3-MPTMS) in ethanol solution, but it
doesn't
say why. Why would you do that?



[1] Metal Thin-Film Micropatterns Transfer on PDMS and its Application
to
Capillary Electrophoresis Electrochemical Detection on PDMS Microchip.
Yongman Park
7th International Conference on Miniaturized Chemical and Biochemical
Analysis
Systems

-Rick Giuly
 GA Tech Laboratory for Neuroengineering
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