Hi,

SILICON RESOURCES (www.siliconresources.com) offer an adhesion promoter
(AP 300) for SU-8
on glass.
Did you try slow temperature ramps during PEB ? your problem might also
be caused by stress because of
the high CTE of SU-8.

Best regards
Peter

--
Vienna University of Technology
Institute of Sensor and Actuator Systems
Gusshausstrasse 27-29/366
A-1040 Wien
Austria

Tel. +43-1-58801-36643
Fax  +43-1-58801-36699




Arne Schleunitz wrote:

>Hi,
>
>I have adhesion problems of 120um thick and 50um wide SU-8 50 structures on
pyrex.
>I have a long dehydration time (at least one hour), a high exposure dose
(600mJ/cm2) and even tried stepwise exposure.
>Although I could improve the adhesion some parts still peel of during the
development.
>I know, that by increasing the exposure dose I could get better adhesion, but
an unwanted side effect would be rough sidewalls that I try to prevent...
>
>I appreciate any comments!!! Thanks in advance.
>
>Arne
>
>---
>
>Arne Schleunitz
>
>MEMS Sensors and Actuators Lab
>
>Department of Electrical and Computer Engineering
>
>University of Maryland
>
>Tel: (301) 405-1897
>
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