durusmail: mems-talk: Touch polishing
Touch polishing
2004-09-02
Touch polishing
Cheng-Jien Peng
2004-09-02
Hi, Everyone:

I tried to find the information of touch polishing,
but most web sources only mention the noun without any
detailed description. Does any one know how to
touch-polish the silicon wafers? Thanks a lot in
advance.

Best regards,
Cheng Peng

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