durusmail: mems-talk: RE: Spam:[mems-talk] Polymer solutions to be coated by spin coater
RE: Spam:[mems-talk] Polymer solutions to be coated by spin coater
2004-09-02
RE: Spam:[mems-talk] Polymer solutions to be coated by spin coater
Matthew Coda
2004-09-02
Hi,

I can't give you much advice on solvents but I can tell you that you'll need
very small chain lengths to make a 20nm film, my first guess is a molecular
weight below 10K.  Have you considered photopolymerization as a route to the
thin films?  PMMA shouldn't be difficult to achieve this way.


Good luck,
Matt

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Kim, Ick Chan
Sent: Tuesday, August 31, 2004 7:34 PM
To: MEMS Researcher
Subject: Spam:[mems-talk] Polymer solutions to be coated by spin coater


Dear MEMS researcher,


I wish to coat several polymer solutions on the silicon substrate
by spin coater.  It is to make a research for the measurement of thermal
conductivity of thin polymer film.

The thickness is 2 micro m, 200 nm, 20 nm for each film.

The polymer films are poly(ethylene terephthalate), polycarbonate, and PMMA.

Does anybody know what kind of solvent is proper for each polymer, and what
concentration is proper for those thickness?

Thank you very much.
Sincerely

Ickchan Kim


--
Ickchan Kim                              Office Phone: (979)845-9598
ickim@tamu.edu                           C.P.#       : (979)574-4179

Office: ENPH #401, Conduction Heat Transfer Lab.
        Department of Mechanical Engineering, Texas A&M University
        College Station, Texas 77843-3123




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