Hi, I can't give you much advice on solvents but I can tell you that you'll need very small chain lengths to make a 20nm film, my first guess is a molecular weight below 10K. Have you considered photopolymerization as a route to the thin films? PMMA shouldn't be difficult to achieve this way. Good luck, Matt -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of Kim, Ick Chan Sent: Tuesday, August 31, 2004 7:34 PM To: MEMS Researcher Subject: Spam:[mems-talk] Polymer solutions to be coated by spin coater Dear MEMS researcher, I wish to coat several polymer solutions on the silicon substrate by spin coater. It is to make a research for the measurement of thermal conductivity of thin polymer film. The thickness is 2 micro m, 200 nm, 20 nm for each film. The polymer films are poly(ethylene terephthalate), polycarbonate, and PMMA. Does anybody know what kind of solvent is proper for each polymer, and what concentration is proper for those thickness? Thank you very much. Sincerely Ickchan Kim -- Ickchan Kim Office Phone: (979)845-9598 ickim@tamu.edu C.P.# : (979)574-4179 Office: ENPH #401, Conduction Heat Transfer Lab. Department of Mechanical Engineering, Texas A&M University College Station, Texas 77843-3123 _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/