How to make this kind of thick mold? Is that the procedures similar to normal case? ( like spin coating >>softbake >> uv exposure >> hard bake >> develope.....) And what kind of su-8 should i choose? su-2000? What is the meaning of multi spinning programme? "With a multi spinning program, we have patterned in one exposure a 1200 µm and a 2300 µm layer, which is, to our knowledge, the thickest structure ever patterned using microfabrication techniques." by IBM ( http://dmtwww.epfl.ch/ims/micsys/projects/su8/epon.html ) Does anyone make a such thick mold before? Can you share your experience? Any of suggestions and advice are valuable to me. thanks in advance.