Hi Laleh

What kind of etch are you trying to do. If it is an isotropic etch then xenon
difluoride will etch Mo at around 1um to 2um a minute in surface micromachining
applications. W may also etch in XeF2 but it is very variable and will be much
slower.

David Springer
XACTIX, Inc
www.xactix.com

>>  I need to etch W and Mo films, What are the best etchants which can be
 >>  used in
 >>  1-2 Micron resolution?

 >>  Laleh Rabieirad

 >>  ECE Department
 >>  Purdue University
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