durusmail: mems-talk: Mo and W etchant
Mo and W etchant
2004-09-11
2004-09-10
Mo and W etchant
Nivedita
2004-09-11
If you are looking for wet etchants then Transene Co. has good etchants. Go
to www.transene.com


----- Original Message -----
From: 
To: 
Sent: Thursday, September 09, 2004 2:11 PM
Subject: [mems-talk] Mo and W etchant


> I need to etch W and Mo films, What are the best etchants which can be
used in
> 1-2 Micron resolution?
>
> Laleh Rabieirad
>
> ECE Department
> Purdue University
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