Adam, Try: Bondtronix, Inc. Michael Boyle 925-947-2664 Regards, Klaus Ruhmer -----Original Message----- From: Adam CohenTo: MEMS@ISI.EDU Date: Wednesday, November 18, 1998 12:52 PM Subject: Source for SOI wafers, wafer bonding source, etc. >Dear Colleagues, > >We are seeking a source for a small quantity of SOI wafers with a Si >thickness of about 50 microns for deep silicon RIE. We would prefer 4" >diameter wafers, but other sizes may be acceptable. Substrate/overall >thickness should be as large as possible. > >As an alternative to these, we are considering bonding a 50-micron Si wafer >to glass. Does anyone know good sources for thin wafers and flat glass >substrates, and someone who can do the bonding? > >If anyone has any leads, we'd much appreciate it. > >Thanks very much, > >Adam Cohen >University of S. California > > >