durusmail: mems-talk: Sputtering titanium on ceramic
Sputtering titanium on ceramic
2004-09-14
2004-09-15
2004-09-16
Sputtering titanium on ceramic
Alain
2004-09-14
Hi all
Has anyone sputtered titanium on a ceramic type material (we are using Macor)?
We have had good adhesion of titanium on ceramic but when other layers are added
(cu and nickel in that order), it peels off. Any literature on a similar process
anyone knows of or has experience with?
Thanks
Alain

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