Hi Miheala,

This article may help, it a how to calculate Si modulus Young's modulus,
Poisson ratio, etc. I think I originally got it from someone on this MEMs
discussion list.. If its not what you're looking for, it at least has
references that do provide a 'how to calculate' these things.

Cheers,

Paul






-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Mihaela Miu
Sent: 15 September 2004 13:57
To: mems-talk@memsnet.org
Subject: [mems-talk] silicon oxide properties

Hi All;


Does anyone know about silicon oxide properties like density, Young's modul,
Poisson ratio, or conductivity?
Where can I get this information?

Regards;

Mihaela

Mihaela Miu
National Institute for Research and Development in Microtechnologies
(IMT - Bucharest)
Erou Iancu Nicolae 32B, 72996 Bucharest, Romania
http://www.imt.ro 
Phone: +40-21-490.84.12;
Fax: +40-21-490.82.38

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