Hi Patrik, we have, just lately, removed a 60nm Au film from a plastic substrate. That worked pretty well with a diode laser without any damage on the plastic side. I am not sure what the Ti film underneath will do to the process, but I doubt that it has a big influence. The dimensions can be easily achieved. Reiner Witte +++++++++++++++++++++++++++++++++++++++++++++ Reiner M. Witte (Project Engineer) Micromachining Fraunhofer USA, Inc. Center for Laser Technology 46025 Port Street Plymouth, MI 48170, USA Phone +1 (734) 354 6300 *209 Fax +1 (734) 354 3335 ICQ: 6259777 E-mail: mailto:rwitte@clt.fraunhofer.com Info: http://www.clt.fraunhofer.com CLT is a member of http://www.laserspot.com +++++++++++++++++++++++++++++++++++++++++++++ The information contained in this communication and any files transmitted with it is confidential, may be attorney-client privileged, may constitute company privileged information, and is intended only for the use of the addressee. It is the property of Fraunhofer USA or an affiliate thereof. Unauthorized use, disclosure, or copying of this communication or any part thereof is strictly prohibited and may be unlawful. If you have received this communication in error, please notify us immediately by return e-mail and destroy this communication and all copies thereof, including all attachments. <[ -----Original Message----- <[ From: Patrik Möller [mailto:pmoller@kth.se] <[ Sent: Wednesday, September 15, 2004 11:10 AM <[ To: mems-talk@memsnet.org <[ Subject: [mems-talk] thin film metal removal / patterning <[ <[ <[ Does anybody know a way to locally remove a thin <[ gold/titanium film? Say <[ open up 0.1-1mm diameter holes in a Au/Ti (200/15nm) film on <[ a silicon <[ wafer without damaging the silicon? The placement accuracy <[ of the holes <[ need to be +/- 100µm. Regular lithography cannot be used <[ since the film <[ should remain untouched with polymers. Are there any kinds of laser <[ processing or similar that can be used? Any ideas? <[ <[ Regards, <[ <[ Patrik <[ <[ <[ <[