Dear all.

Does anyone know an ITO wet/dry etchant which is selective to Al.

Does anyone know more wet ITO etchants.
I know only these:(

1HCl : 1H2O, rate = 0.8 nm/sec
1HF : 1H2O2 : 10H2O,  rate = 12.5 nm/sec

Best regards,
Eugenie Shelegeda.