AZ300 etches Aluminum.  I expect NaOH will, too, though I'm not sure how
fast.  Most any hydroxide will etch Al.

-Bill

--original message--
We've used diluted NaOH at room temperature. The etch is rather slow,
but if it's heated it will start to etch the ITO as well. AZ 300
developer also works rather well. There are also commercial etchants
available selective to ITO.

-Jeff Campbell


Eugenie Shelegeda wrote:

>Dear all.
>
>Does anyone know an ITO wet/dry etchant which is selective to Al.
>