durusmail: mems-talk: Regd Si Wafer Placing in KOH to Produce V-groove
Regd Si Wafer Placing in KOH to Produce V-groove
2004-09-16
2004-09-17
2004-09-17
Regd Si Wafer Placing in KOH to Produce V-groove
koshy
2004-09-17
Hi,
You place it vertically using a specifically designed jig with
evaporation relieves. Ensure that the tank is incorporated with a
miniature motor to
Control the stirring of the KOH during the etch process.
This is to give an even etch rate during the KOH process.

Koshy Matthews
VP/CTO
Impacsys Inc.
Soeul Korea
Tel:82-10-3124-2207

-----Original Message-----
From: Dhanamjaya Guda [mailto:dguda1@paws.lsu.edu]
Sent: Thursday, September 16, 2004 10:02 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Regd Si Wafer Placing in KOH to Produce V-groove

Hi,

  I am  trying to produce v-groove on Si using KOH. Could any one please
tell me how to place the Si wafer (either verical or horizontal i.e just
dropping the wafer in the solution) in the KOH solution and also could
you please give me particular reasons for choosing the one. I would
really appreciate if any one could reply to this mail as soon as
possible.

Thanks,
Dhanamjaya R Guda
Louisiana State University
Baton Rouge -LA
Phone no: 225-578-4412





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