Hi Friends

      I need to deposit Platinum through E- Beam Evaporation for some of
our MEMS application. Can Anybody suggest what kind of beam sweep pattern
is suitable for platinum evaporation? and Why?

I am using 7KW e beam power.

Regards

     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071