Hi
I am trying to lift off sputtered film of SiGeO having ~4000 Angstrom
thickness. Can someone tell me the correct procedure to do it? Thank
you.

Mukti M Rana
PhD. Student in Electrical Engineering
The University of Texas at Arlington
Room # 208, Nano Fab Center
500 Cooper St. , Box 19072
Arlington, TX 76019, USA
Tel: (817) 272-1265 (Office)
       (817) 723-1090 (Cell)