You can etch soda-lime glass with HF or BOE.  The etch rate will be well
under 1 um/min.  Photoresist will tend to lift if used as a mask. I have
used Cr a mask for etching Pyrex with BOE.  However this resulted in
undercut greater than the etch depth.  I read somewhere that Cr with an
over layer of Au works better than Cr by itself.  I've also heard of
people using polysilicon as a mask.  You can etch soda-lime glass with
SF6 plasma, but the etched surface tends to be very rough.

Roger Shile