Hi Nicolas, I use 353ND by Epoxy Technology, USA for mounting of wafers, and the stack pass all operations (litho, chemical etches, evaporation and sputtering properly). We not use DRIE, but I think it will be OK. Sincerely, Vladimir Krasniansky, Process Engineer, Gal-El (MMIC); 100, Yitzhak Hanassi Blvd., P.O. Box 330 Ashdod 77102, ISRAEL. Tel 972-8-857-2436/4 Fax 972-8-857-2658 The information contained in this communication is proprietary to Israel Aircraft Industries Ltd. and/or third parties, may contain confidential or privileged information, and is intended only for the use of the intended addressee thereof. If you are not the intended addressee, please be aware that any use, disclosure, distribution and/or copying of this communication is strictly prohibited. If you receive this communication in error, please notify the sender immediately and delete it from your computer. Thank you. This message is processed by the PrivaWall Email Security Server.