Hi,

There are plenty of literature which suggest adding chemicals to
prevent formation of hillocks. I suggest Petersen's Bulk Micromachining
review paper.

Best, Joolien


On Oct 3, 2004, at 4:48 PM, Qing Yao wrote:

> Hi,
>
>
> During the KOH etch on {100} silicon surfaces, lots of micropyramid
> hillocks are formatted. I was wondering if there is any effective
> method that can be used to get a smooth and pyramid free etched
> surface. I used 30% w/w KOH and IPA and did the etch at 80C. Please
> let me know if you have any comments or suggestions. Thanks!
>
>
>
> Best Regards,
>
>
> Qing Yao
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> M&IE @ UIUC
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