I was trying to spin coat aluminium with shipley 1818 negative resist. But when I used a wet etching solution the resist wasn't able to withstand the etchant. My patterns are on the scale of microns and the best way to etch is through wet etching because i need to remove alomost 300 micron thick aluminum. Does anyone know the steps to spin a thick layer of resist that will withstand the etchant that is made up of Hcl and CuCl2. I have SU-8 and 1818 to my disposal. I also need to remove the resist after the etching process. Thank you, Vivek Mukhatyar