maybe you should try phosphoric acid instead? shay Vivek Mukhatyar wrote: >I was trying to spin coat aluminium with shipley 1818 negative resist. > But when I used a wet etching solution the resist wasn't able to >withstand the etchant. My patterns are on the scale of microns and >the best way to etch is through wet etching because i need to remove >alomost 300 micron thick aluminum. Does anyone know the steps to spin >a thick layer of resist that will withstand the etchant that is made >up of Hcl and CuCl2. I have SU-8 and 1818 to my disposal. I also >need to remove the resist after the etching process. > >Thank you, > >Vivek Mukhatyar >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ > > >