Dear Sir,
                Some years ago I conducted research on the use of thin polymeric
waveguide
devices for use in various sensory roles. One of the devices we developed
and successfully tested was an optical pressure transducer. A thin single
mode (planar or channel) waveguide is fabricated on a suitable substrate and
coated with a suitable buffer layer. A laser is coupled into the waveguide
and propagated to a detector. Pressure variations experienced by the buffer
layer will be translated into modal attenuation of the guided beam, which
can be detected and translated into a pressure reading. Such devices have
the advantage that they are completely compatible with MEMS technology, they
are immune to electromagnetic interference, small, and do not require any
fluids to mediate the pressure change.
        I hope that you find this of interest!


 Karl H. Cazzini (Ph.D)
Conifer Group & Associates,
116 Cochituate Road,
Framingham MA 01701
USA



-----Original Message-----
From: mems-mgr@ISI.EDU [mailto:mems-mgr@ISI.EDU]On Behalf Of
Eziegel@aol.com
Sent: Tuesday, November 17, 1998 4:46 AM
To: MEMS@ISI.EDU
Subject: pressure polymer sensor



what is the MEMS technology used to make a pressure polymer sensor?
What is the polymer used? Can we avoid this micromachining process to make
this sensor? Which is the packaging adapted to use this sensor in water
(another membrane acting on an oil fluid?)?

Could you give me title or publications about this subject?

Thanks in advance,

M.Eric ZIEGEL
52 Avenue Alsace Lorraine
38000 Grenoble FRANCE