I was wondering if anyone else on this newsgroup uses a dual
chamber Plasma-Therm ICP.  I have a few questions for those who do.

1. How often do you have to change out your turbo pumps to be serviced?

2. What kind of restrictions do you have for each chamber?

3. How often do you have to open the chamber to remove wafers lost inside.

Thank you,

Charlie





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Charlie Suh
Electrical Engineer II
Mircoelectronics Research Center
791 Atlantic Drive
Atlanta, Georgia 30332
Email: cs176@prism.gatech.edu