At 12:41 PM 10/7/2004 -0500, you wrote:
>Hi Charlie,
>We have a single chamber Plasma Therm system, which is heavily used for
>III-Vs and SiC.  Most etching is with Cl2 or other chlorine-based gases and
>SF6.  We unfortunately have to have the turbo pump rebuilt every 6 months or
>so (we are not sure why it fails so frequently).
>
What part of the pump gets replaced on the rebuild?
What indicates when you have to do a rebuild?


--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797