Dear Mark (and pass this on to Charlie)

My RIE has a corrosive series turbo pump with a N2 purge port that puts 10 sccm
of N2 over the bearings to protect the lubrication from being removed.  Any
turbo
that needs to get sent out that did not blow up is just getting a new bearing
assembly installed.  If you are sending your pump out too often you need to make
sure your turbo is made for corrosives and has a N2 purge on the pump.  Also
make
sure the correct oil is used in the pump.

Have a good day,

Brent

Mark Fuller wrote:

> At 12:41 PM 10/7/2004 -0500, you wrote:
> >Hi Charlie,
> >We have a single chamber Plasma Therm system, which is heavily used for
> >III-Vs and SiC.  Most etching is with Cl2 or other chlorine-based gases and
> >SF6.  We unfortunately have to have the turbo pump rebuilt every 6 months or
> >so (we are not sure why it fails so frequently).
> >
> What part of the pump gets replaced on the rebuild?
> What indicates when you have to do a rebuild?
>
> --
> Mark Fuller
> Microelectronics Fabrication Facility
> Washington State University
> Dana Hall 102
> Pullman, WA  99164-2711
> (509)335-1797
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