Place your glass (square, rectangular slides) on a circular plate or wafer, and
then spin coat the PR.

Krishna Vummidi  wrote:Hi,
Im trying to pattern su-8 on glass (square, rectangular slides). Edge bead seems
to be inevitable. Suggestions on minimizing them would be really appreciated.
thanks, krishna

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Krishna Vummidi

GRA, Wireless Microsystems Lab (www.ece.vt.edu/wml)
The Bradley Department of Electrical and Computer Engineering
Virginia Polytechnic Institute and State University
433 Whittemore Hall (Mail Code 0111), Blacksburg, VA 24061

(540) 231-3411 (Voice) -3362 (Fax) E-mail: kvummidi@vt.edu

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